翻译部分英文原文
第1页
MICROPLANETARYREDUCTIONGEARUSING
SURFACEMICROMACHINING
AbstractAmicropla
etarygearmecha
ismfeaturi
gahighgearreductio
ratiowith
compact
essi
sizeisprese
tedi
thispaperSUMMiTVisemployedforthefabricatio
methodsothattheredu
da
cyofassembli
gpartsiselimi
atedThedesig
rulesofwhichhasalsobee
checkedTomakefulluseofthebe
efitsofthesurfacemicromachi
i
gthepla
etaryreductio
gearisdesig
edtowardusi
gtheo
chipmicroe
gi
eTheexpectedgearreductio
ratioiscalculateda
dcomparedwiththeco
ve
tio
alchai
gearmecha
ismThemicropla
etarygearmecha
ismprese
tedi
thispaperisexpectedtohave1621reductio
ratioutilizi
glessspaceco
sumptio
Thisisa
orderofmag
itudehighertha
thepreviouslyreporteddesig
i
asi
glereductio
geartrai
KeywordsMEMSpla
etarygearreductio
gearsurfacemicromachi
i
gSUMMiTVprocessNome
clatureasu
gearbpla
etgearsci
ter
algearfixeddi
ter
algearrotary
the
umberofu
itsofgeartrai
DdiameterofthepitchcircleN
umberofteethP
umberofpla
etsa
gularvelocityI
troductio
Thegearmecha
ismsi
microelectromecha
icalsystemsMEMSarecommo
lyexpectedtoge
eratehightorquei
theco
fi
edmicrosizesystemsHoweveritisge
erallydifficultforthemicroscalesystemstohavesuchahigh
f第2页
torquewithouthavi
gmultiplereductio
systemsThedesig
ofthereductio
geardrivebasedo
apla
etaryparadoxgearmecha
ismca
i
creasethetorquewithi
acompactareasi
cethemicropla
etarygearsystemhasa
adva
tageofhighreductio
ratioperu
itvolume1Howeveritsmecha
ismissocomplicatedthatrelativelyfewattemptshavebee
madetomi
iaturizethegearsystems23Suzumorietal2usedthemecha
icalparadoxpla
etarygearmecha
ismtodrivearobotfor1i
pipesforwardorbackwardTheyemployedasi
glemotortodrivethegearmecha
ismswithhighreductio
ratioPrecisegearfabricatio
wase
abledbymicrowireelectricaldischargemachi
i
gmicroEDMThesepartshowevershouldbeassembledbeforethedrivemotorisattachedtothegearboxTakeuchietal3alsousedmicroEDMtofabricatethemicropla
etarygearsTheysuggestedspecialcermetsorHighCarbo
SteelforpossiblematerialsWhilethedesig
ca
achieveareductio
ratioof200thegearsshouldalsobeassembleda
dmotordrive
Toe
ablethedrivi
gofthepla
etarygearbyo
chipmea
sSa
diaUltrapla
arMultilevelMEMSTech
ologySUMMiTVprocess4forpla
etarygearfabricatio
isadoptedi
thisstudyTheSUMMiTVprocessistheo
lyfou
dryprocessavailablewhichutilizesfourlayersofreleasablepolysilico
foratotaloffivelayersi
cludi
gagrou
dpla
e5Duetothisfactitisfreque
tlyusedi
complicatedgearmecha
ismsbei
gdrive
byo
chipelectrostaticactuators5Howeveri
ma
ycasesr