1
lm
i

＝
00
6m3
hr
BulkGas一般流速为10ms压力75kgcm2Ar、He1015msSiH4、PH35msCO2、NH315ms
SpecialGasNH3、N2O、HCL、BCL3、HF、HBr、SF6等液态气体，流速应小于1ms一般气态钢瓶10ms，液态钢瓶则蒸汽压愈低，流速要愈慢，否则管件上将生结露现象，影响Regulator的准确性
LPMm3hr
FlowQFlowQ
LPMlmi
m3hr
73044
2098126
3647219
8716523
170521023
282591696
422822537
591213547
7877512277518099425047633122142322842322862878847267366108601502919873253942539437727
88933453360
kgcm2t
PressurePTemperatureT
kgcm2°
7
7
7
7
7
7
7
7
7
7
7
7
7
7
7
7
7
25
25
25
25
25
25
25
25
25
25
25
25
25
25
25
25
25
Tube
14